Date on Master's Thesis/Doctoral Dissertation

5-2024

Document Type

Master's Thesis

Degree Name

M. Eng.

Department

Electrical and Computer Engineering

Degree Program

JB Speed School of Engineering

Committee Chair

McNamara, Shamus

Committee Member

Harnett, Cindy

Committee Member

Mendes, Sergio

Author's Keywords

MEMS; low power; optical interference; communication; optical fiber

Abstract

This thesis discusses the use of MEMS (microelectromechanical systems) optical cavities for use in low power communication. MEMS optical cavities are thin air gaps between an actuated MEMS mirror and a fixed glass encapsulation. By moving the MEMS mirror the reflectivity of the MEMS optical cavity can be changed. This change in reflectivity can be used to transmit information passively by modulating reflected light intensity instead of generating new light using a light source. These MEMS optical cavities are demonstrated using optical fibers for illumination delivery and reflected light collection. In addition to being reflected for communication, the illuminating light can also be absorbed to deliver power, data, and a clock signal. Infrared light which is less absorbed in silicon may also be utilized for series arrays of MEMS optical cavities. A LED (Light Emitting Diode) driver for sending illumination light for power and data transmission is also designed and fabricated.

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